Development of micro -electro mechanical systems (MEMS) focusing on design, simulation and analysis tools, fabrication technologies and processes, integration techniques, and assembly and packaging approaches. Application of MEMS in sensors and actuators, microdevices for opto -mechanical systems, fluidic microsystems, biomedical engineering, wireless communication, power supply and energy harvesting and nano - electro -mechanical devices.
20 Jan - 24 Jan 2013
Taipei International Convention Center
603 Nishi-Shinjuku 3-6-5, Shinjuku-ku
Tokyo Japan 160-0023
+81 3 3346 8007
+81 3 3346 8002 (fax)
Please see the conference Web site for full details.