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This conference focuses on new developments in test structures, as well as their implementation and/or application, related to silicon, semiconductors, nanotechnology and MEMS. Suggested topics include Material and Process Characterization, Device and Circuit Modeling, Parameter Extraction, Yield Enhancement and Production Process Control and so on.
25 Mar - 28 Mar 2013
Osaka University Nakanoshima Center
Osaka, Japan
Tatsuya Ohguro
8, Shinsugita-Cho, Isogo-ku
Toshiba Corporation
Semiconductor & Storage Products Company
Japan Yokohama 235-8522
+81 45 776 5697
+81 90 6514 748
+81 45 776 4104 (fax)
tatsuya.ooguro@toshiba.co.jp
21133
100
Please see the conference Web site for full details.
Abstract submission deadline: 21 Sep 2012
Final submission deadline: 14 Jan 2013
Notification of acceptance date: 14 Nov 2012