MEMS Interface Circuits Workshop

MicroElectroMechanical Systems (MEMS) and their interface circuits is the focus of the Solid-State Circuits and Technology Committee Workshop this fall. MEMS technology permits the fabrication of complex, mechanical shapes on a micron scale, using batch processing similar to that used by integrated circuit manufacturers.

I. Lyusternik of Case Western Reserve University will discuss the interface circuits
to this micromotor with electrostatic bearings at the day and a
half interactive workshop of experts on interface circuits for MEMSF
scheduled October 14, 15 in the Washington, DC area.

The SSCTC workshops are interactive meetings of experts in disciplines related to IC design. Neither tutorials nor short courses, the workshops are informal with no written digest. Attendees are active in the field of the workshop. The speakers discuss the latest developments in their work and there is significant time allocated for audience participation and discussion.

With a new generation of micro mechanical sensors and actuators arising, interfacing to these transducers presents new implementation opportunities and challenges to the circuit engineers. Topics are still being finalized but workshop speakers will present circuit-oriented work in areas such as these:

• capacitive sensors requiring sub femtofarad resolution and noninvasive stimulation;
• high-Q resonant structures for oscillators and micro-mechanical mixers and filters;
• variable capacitors and suspended inductors for high frequency tuned oscillators;
• suspended resistive bridges for low thermal time constant;
• 2-D Hall sensors and magneto-transistors;
• closed loop, e.g., force-balanced and/or levitated, sensors and actuators;
• large transducer arrays which demand low-noise, power-efficient circuits;
• CAD and process technology for integrated MEMS and circuit chips.

For more up-to-date information about the workshop, please consult the web site:

http://www.sscs.org/ssctw/oct99/

The workshop is scheduled for October 14-15, 1999 at the Key Bridge Marriott, in Arlington, VA just across the Potomac River from Washington DC. The workshop will consist of approximately twenty 30-minute talks spread over one and a half days, Thursday and Friday morning. Mid-morning and mid-afternoon coffee breaks, in addition to lunch and reception on Thursday evening, are planned to allow participants to interact. Attendance is limited and pre-registration is required. Inquiries on agenda, registration, and local arrangements should be addressed by fax or e-mail to:

Nicole Rath,
Courtesy Associates
fax: 202-973-8722,
e-mail: nrath@courtesyassoc.com

Coordinators: Darrin Young and Steve Garverick (Case Western Reserve University)
tel: 216-368-6436,
fax: 216-368-2668,
email: slg9@po.cwru.edu

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