IEEE Journal of Microelectromechanical Systems

The Journal is jointly sponsored by

IEEE Electron Devices Society

IEEE Industrial Electronics Society

IEEE Robotics and Automation Society

The American Society of Mechanical Engineers

The Journal publishes papers that describe advances in microelectromechanical systems (MEMS). Topics covered in JMEMS papers deal with micromechanics, microdynamical systems, microfabrication technologies useful for MEMS, modeling and design issues for MEMS, materials properties that bear on MEMS designs, phenomena pertinent to MEMS designs and performance, MEMS characterization and reliability, interface issues affecting mechanical, electrical, chemical, and biological factors associated with MEMS, tribology issues for small devices. Typical MEMS devices have smaller than mm dimensions and they are characterized by engineering and control of lengths and movements that range typically from nm to micrometers. Papers that are sometimes described as being concerned with nanotechnology are welcome in IEEE/ASME JMEMS, a journal in which the term "micro" is interpreted in its classical sense as "tiny."

IEEE Journal of Microelectromechanical Systems