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Semiconductor Manufacturing, IEEE Transactions on

Semiconductor Manufacturing, IEEE Transactions on

Addresses innovations of interest to the integrated circuit manufacturing researcher and professional. Includes advanced process control, equipment modeling and control, yield analysis and optimization, defect control, and manufacturability improvement. It also addresses factory modeling and simulation, production planning and scheduling, as well as environmental issues in semiconductor manufacturing.

Membership in IEEE's technical societies provides access to top quality publications such as this one either as a member benefit or via discounted subscriptions. The electronic version is available to those with no membership ties to IEEE or its societies, and anyone with memberships can simply purchase the combination (electronic and print) option.

Frequency: 4

ISSN: 0894-6507

Product No: PER145

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