Semiconductor Manufacturing, IEEE Transactions on

Semiconductor Manufacturing, IEEE Transactions on

Addresses innovations of interest to the integrated circuit manufacturing researcher and professional. Includes advanced process control, equipment modeling and control, yield analysis and optimization, defect control, and manufacturability improvement. It also addresses factory modeling and simulation, production planning and scheduling, as well as environmental issues in semiconductor manufacturing.

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Frequency: 4

ISSN: 0894-6507

Product No: PER145

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